surface contamination

Combined microscopies study of the C-contamination induced by extreme-ultraviolet radiation: A surface-dependent secondary-electron-based model
S. Prezioso, M. Donarelli, F. Bisti, L. Palladino, S. Santucci, S. Spadoni, L. Avaro, A. Liscio, V. Palermo, L. Ottaviano